Electronic Characteristics of Semiconductor Materials: The "Blood" of Semiconductor Production

In industry, gaseous products under normal temperature and pressure are collectively referred to as industrial gas products. According to the different preparation methods and application fields, industrial gases can be divided into bulk gases and special gases. Bulk gases mainly include oxygen, nitrogen, argon and other air separation gases, and acetylene, carbon dioxide and other synthetic gases. Special gases mainly include electronic gases, high purity gases and standard gases.

Electronic special gas (electronic special gas) is a high-tech, high value-added product, which is widely used in semiconductor and microelectronics industry. Electronic special gas mainly includes hydride, fluoride, fluoroalkane, metal-organic compounds, etc., which is an indispensable important material for the production of ultra-large scale integrated circuit, flat display device, compound semiconductor device, solar cell, optical fiber and other electronic industry. Electronic special gas is widely used in film manufacturing, etching, doping, vapor deposition, diffusion and other processes in the production of integrated circuits and display panels.

The quality of electronic gas mainly depends on its purity and clarity. In general, the purity of the electronic gas requirements reached 5N-6N (N refers to the number of 9 in the purity percentage, such as 5.7N means 99.9997%, 6N means 99.9999%), while also requiring the purification of metal elements to 10-9 to 10-12 levels. Each N increase in purity, and each order of magnitude reduction in particle and metal impurity concentration, will bring a significant increase in process complexity and difficulty. Once the purity or clarity of the electronic gas is not up to standard, the light makes the downstream product quality is not up to standard, and the heavy spreads the pollution of the entire product line, resulting in all the products being scrapped.

Due to its important role in the production of electronic industries such as semiconductors, electronic gas is known as the "blood" of the electronics industry.